Shin-Etsu
Silicone, HIVAC F-4 and HIVAC F-5 are
silicone diffusion pump fluids designed to produce such
high vacuum as 10-7 mm Hg and 10-12 mm Hg, respectively.
Description :
The highly developed techniques and technology has rapidly
enlarged the scope of the use of high vacuum apparatus
in many branches of industry. For example, high vacuum
apparatus are used for the manufacture of semiconductor
parts in electronic industry and metal processing industry,
various types of miegrated circuits, high vacuum tubes,
electronic parts, melting processing and moulding metals
and alloys, and used as apparatus of vacuum evaporation
in plastic and plating industries.
In general, diffusion pump fluids are capable of producing
vacuum in range of 10-3
to 10-10 mmHg. The
efficiency and the lifetime of oil diffusion pumps related
to vacuum value of ventilation etc. highly dependent
upon the mechanical system of the pumps and the kinds
of fluids used.
The recent technical progress in the field of high vacuum
apparatus enable us to achieve a high range of 10-10mm
Hg by using the oil diffusion pumps. Therefor, the choice
of a suitable fluid is a very important factor for operating
the oil diffusion pump efficiency.
Diffusion pump fluids widely and commonly used at present
are mainly those of petroleum series and ester series
of fatty acids. These fluids are inconvenient for us
to obtain a very high vacuum for a very relatively long
period of time. Since operating temperature of diffusion
pumps rises upto about 200°C, the thermal cracking
of fluids of petroleum series and ester series of fatty
acids are easy to be carried out. Furthermore, those
fluids may solidify due to their rapid oxidation , generate
fatty acids, accelerate decomposition under the influence
of pulled-in gas.
However, Shin-Etsu silicone fluids HIVAC F-4
and HIVAC F-5 Posses excellent resistance to
heat, oxidation, chemicals etc., which actually prevents
them from being adversely influenced by pulled in gas
. Therefore, the following troubles may be avoided by
the use of silicone diffusion pump fluids; the decrease
of thermal conductivity of heater parts, the closure
of nozzle parts,the corrosion of the apparatus, the
decrease of high vacuum, etc., due to thermal oxidation
of fluids.
Thus, Shin-Etsu diffusion pump fluids HIVAC F-4
and HIVAC F-5 make it feasible for the high vacuum
apparatus to be operated constantly at a high vacuum
for relatively a long period possible. The high vacuum
obtained by this fluid is far superior to the ease of
HIVAC F-4, without any raps. HIVAC F-5
is capable of producing a high vacuum in the range of
10-9 to 10-10
torr (mmHg).
If any traps of liquid nitrogen etc., are fixed in high
vacuum apparatus, this value can further be down to
10-12
torr (mmHg).
<< TYPICAL PROPERTIES >>
|
HIVAC
F-4
|
HIVAC
F-5
|
Appearance
|
Light
Straw Transparent
|
Specific
Gravity at 25°C
|
1,065
|
1,097
|
Viscosity
at 20°C
|
37
|
160
|
Refractive
Index at 25°C
|
1,555
|
1,576
|
Pour
Point, °C
|
-35
|
-15
|
Flash
Point, °C
|
210
min.
|
240
min.
|
Boiling
Point, °C/0.5 mtr
|
211
|
243
|
Valor
Pressure at
25°C, to
|
2
* 10-8
|
3
* 10-12
|
Specific
Heat at 25°C,
cal/g°C
|
0.33
|
0.32
|
HIVAC F-4 :
Shin-Etsu Silicone fluid HIVAC F-4 is a purely
distilled product with the following molecular structure:
Molecular Weight 484
With this silicone fluid , a high vacuum n the range
of 10-7 to 10-8
torr(mmHg) can be obtained even if no traps are used,
if any traps of liquid nitrogen etc. Are used , this
value can further be lowered down to 10-10
torr (mmHg)
HIVAC F-5 :
Shin-Etsu silicone fluid HIVAC F-5 is a purely
distilled product with the following molecular structure:
Molecular Weight 546
NOTE:
-
Before
its regular use, vigorously stir by a spatula.
-
To
get the best performance, surface are to be cleaned
of dust and dirt by air spraying or wiping with
a cloth.
-
Other
types of fluids or grease should not get mixed with
HIVAC F-4 or HIVAC F-5.
CAUTION:
-
In
case of contact with eyes, immediately flush eyes
with water for 15 minutes and seek medical attention.
Wipe from skin with a dry cloth or cotton, then
wash with soap and water.
-
When
these materials drop on the floor, it becomes slippery.
For this reason , be sure to clean the floor with
a cloth etc.
STORAGE:
Shin
-Etsu silicone fluids HIVAC F-4 and HIVAC
F-5 should be rightly sealed not to involve foreign
materials including water and stored indoor. Under suitable
storage conditions these fluids had better be used within
six months.
PACKAGING
& PACKING:
HAVOC
F-4 and HIVAC F-5 are supplied in 1L(1.07
Kg) bottels.
All
statements, information and data given herein are believed
to be accurate and reliable but are presented without
guarantee, warranty, or responsibility of any kind,
expressed or implied. Statements concerning possible
use of our products are made without representation
or warranty that any such use is free of patent infringement
and are not recommendations to infringe any patent.
The user should not assume that all safety measures
are indicated or that measures may not be required.
|